Elastic and elastic-plastic analysis of multilayer thin films filled with heterogeneous materials
Due to the mismatch between the coefficients of thermal expansion (CTE) of two adjacent films, the residual stress was growing up during thermal cycling. The aim of this work is to extend the Stoney equation for the multilayer thin films with heterostructure (voids filled with gas or other solids) o...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5052597 |