Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming

Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming

It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to...

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Bibliographic Details
Main Authors: Seitaro Kumamoto, Souichiro Fukuyama, Seiya Nagano, Keiichiro Yasuda, Yusuke Kitamura, Masaaki Iwatsuki, Hideo Baba, Toshihiro Ihara, Yoshitaka Nakanishi, Yuta Nakashima
Format: Article
Language:English
Published: MDPI AG 2022-06-01
Series:Micromachines
Subjects:
precision processing
electroforming
MEMS
metal structures
deformation
Online Access:https://www.mdpi.com/2072-666X/13/7/1046

Internet

https://www.mdpi.com/2072-666X/13/7/1046

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