Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film
A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5107474 |