Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film
A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2019-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5107474 |
| _version_ | 1811334834607357952 |
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| author | Mehdi Rouhani Jonathan Hobley Franklin Chau-Nan Hong Yeau-Ren Jeng |
| author_facet | Mehdi Rouhani Jonathan Hobley Franklin Chau-Nan Hong Yeau-Ren Jeng |
| author_sort | Mehdi Rouhani |
| collection | DOAJ |
| description | A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized. |
| first_indexed | 2024-04-13T17:15:03Z |
| format | Article |
| id | doaj.art-d0c59527612e4928aa11c17486663f90 |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-04-13T17:15:03Z |
| publishDate | 2019-06-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-d0c59527612e4928aa11c17486663f902022-12-22T02:38:09ZengAIP Publishing LLCAIP Advances2158-32262019-06-0196065215065215-510.1063/1.5107474068906ADVNovel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC filmMehdi Rouhani0Jonathan Hobley1Franklin Chau-Nan Hong2Yeau-Ren Jeng3Mechanical Engineering Department, National Chung Cheng University, 168 University Road, Ming-Hsiung Township, Chia-Yi 62102, TaiwanOndaLabs Consultancy, Deca Homes, Clark Freeport, Barangay Margot, Angeles 2009, PhilippinesDepartment of Chemical Engineering, National Cheng Kung University, 1 University Road, Tainan City 70101, TaiwanDepartment of Biomedical Engineering, National Cheng Kung University, 1 University Road, Tainan City 70101, TaiwanA novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized.http://dx.doi.org/10.1063/1.5107474 |
| spellingShingle | Mehdi Rouhani Jonathan Hobley Franklin Chau-Nan Hong Yeau-Ren Jeng Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film AIP Advances |
| title | Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film |
| title_full | Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film |
| title_fullStr | Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film |
| title_full_unstemmed | Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film |
| title_short | Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film |
| title_sort | novel spatially coordinated in situ raman and nanoscale wear analysis of fcva deposited dlc film |
| url | http://dx.doi.org/10.1063/1.5107474 |
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