Ion Composition of the Beam Plasma Generated by Electron-Beam Evaporation of Metals and Ceramic in the Forevacuum Range of Pressure
We present the results of measurements of the ion composition of the plasma generated by an accelerated electron beam in the forevacuum pressure range. It has been found that the main contribution to ionization processes comes from beam electrons. It has been shown that, during the electron-beam eva...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-05-01
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| Series: | Catalysts |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4344/12/5/574 |