2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion
In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cyli...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of Technology, Baghdad
2022-11-01
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| Series: | Journal of Applied Sciences and Nanotechnology |
| Subjects: | |
| Online Access: | https://jasn.uotechnology.edu.iq/article_20596_19828b443d4f7952085963e9860b6b10.pdf |