2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion
In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cyli...
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| Format: | Article |
| Language: | English |
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University of Technology, Baghdad
2022-11-01
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| Series: | Journal of Applied Sciences and Nanotechnology |
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| Online Access: | https://jasn.uotechnology.edu.iq/article_20596_19828b443d4f7952085963e9860b6b10.pdf |
| _version_ | 1798006344160116736 |
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| author | Ali Addie Raid Ismail Mudhafar Mohammed |
| author_facet | Ali Addie Raid Ismail Mudhafar Mohammed |
| author_sort | Ali Addie |
| collection | DOAJ |
| description | In this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cylindrical coordinate system, and particles such as electrons, atoms, and charged ions of argon, zinc, and carbon were tracked in a DC magnetron sputtering system. The sputtering yield profile and particle flux for the eroded target were studied considering the ion and electron density distributions. The maximum sputtering flux of zinc and carbon was 1.975´10<sup>21</sup> m<sup>-2</sup>.s<sup>-1</sup> and 3.7´10<sup>18</sup> m<sup>-2</sup>.s<sup>-1 </sup>respectively. The erosion position of a target was predicted based on the maximum power density distribution at the surface of the target. The accuracy of the simulation was checked by comparing it with the measurement of the target eroded after several hours of sputtering. However, as for the Zn-C mosaic target, the racetrack was identical to the analysis predicted by the numerical simulation process. The results of this work can be used as a guide for designing mosaic targets and optimizing their use for fabricating nanohybrid thin film structures. |
| first_indexed | 2024-04-11T12:53:16Z |
| format | Article |
| id | doaj.art-d1076c0a3359487587a12d7a6aa77da9 |
| institution | Directory Open Access Journal |
| issn | 2788-6867 |
| language | English |
| last_indexed | 2024-04-11T12:53:16Z |
| publishDate | 2022-11-01 |
| publisher | University of Technology, Baghdad |
| record_format | Article |
| series | Journal of Applied Sciences and Nanotechnology |
| spelling | doaj.art-d1076c0a3359487587a12d7a6aa77da92022-12-22T04:23:09ZengUniversity of Technology, BaghdadJournal of Applied Sciences and Nanotechnology2788-68672022-11-012411812710.53293/jasn.2022.5395.1185205962D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target ErosionAli Addie0Raid Ismail1Mudhafar Mohammed2Center of Advanced Materials, Ministry of Science and Technology – IraqDepartment of Applied Sciences, University of Technology – IraqDepartment of Applied Sciences, University of Technology – IraqIn this work, a simulation analysis of a commercial magnetron sputtering source was performed using the finite element method Particle-in-Cell/Monte Carlo Collision (PIC/MCC) to optimize the configuration of the Zn-C mosaic target. The magnetic field distribution was solved in a two-dimensional cylindrical coordinate system, and particles such as electrons, atoms, and charged ions of argon, zinc, and carbon were tracked in a DC magnetron sputtering system. The sputtering yield profile and particle flux for the eroded target were studied considering the ion and electron density distributions. The maximum sputtering flux of zinc and carbon was 1.975´10<sup>21</sup> m<sup>-2</sup>.s<sup>-1</sup> and 3.7´10<sup>18</sup> m<sup>-2</sup>.s<sup>-1 </sup>respectively. The erosion position of a target was predicted based on the maximum power density distribution at the surface of the target. The accuracy of the simulation was checked by comparing it with the measurement of the target eroded after several hours of sputtering. However, as for the Zn-C mosaic target, the racetrack was identical to the analysis predicted by the numerical simulation process. The results of this work can be used as a guide for designing mosaic targets and optimizing their use for fabricating nanohybrid thin film structures.https://jasn.uotechnology.edu.iq/article_20596_19828b443d4f7952085963e9860b6b10.pdfmosaic targe erosionpic/mcc analysismagnetron spurting simulationnanohybrid thin films |
| spellingShingle | Ali Addie Raid Ismail Mudhafar Mohammed 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion Journal of Applied Sciences and Nanotechnology mosaic targe erosion pic/mcc analysis magnetron spurting simulation nanohybrid thin films |
| title | 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion |
| title_full | 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion |
| title_fullStr | 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion |
| title_full_unstemmed | 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion |
| title_short | 2D Particle-in-Cell/Monte Carlo Collision Simulation of Zn-C Mosaic Target Erosion |
| title_sort | 2d particle in cell monte carlo collision simulation of zn c mosaic target erosion |
| topic | mosaic targe erosion pic/mcc analysis magnetron spurting simulation nanohybrid thin films |
| url | https://jasn.uotechnology.edu.iq/article_20596_19828b443d4f7952085963e9860b6b10.pdf |
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