Influence of deposition conditions on structure parameters and mechanical properties of multi-element coatings based on niobium nitride
The paper presents the results of studies of the influence of the deposition conditions, coatings NbTiZrN, NbTiAlN on structure parameters and mechanical properties. It is shown that the changes of these parameters depend on the composition of coatings. It was found that the condensation temperature...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2019/47/matecconf_icmtmte18_00085.pdf |