Study of dry etched N-polar (Al)GaN surfaces obtained by inductively coupled plasma etching
We report the Cl-based inductively coupled plasma etching of N-polar Al(Ga)N layers obtained from layer transfer. It is found that debris appeared on the etched N-polar surface after exposing in air for a short period whereas the etched Al-/Ga-polar surface was clean and smooth. The debris can be co...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-10-01
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| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2022.1042998/full |