Wet chemical poly-Si(n) wrap-around removal for TOPCon solar cells
This work gives an overview on different technological solutions for polysilicon removal in industrial tunnel oxide passivated contact (i-TOPCon) n-type silicon solar cell fabrication. The removal of parasitically deposited poly-Si layers on the front and the edges is a mandatory requirement for a l...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2024-01-01
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| Series: | EPJ Photovoltaics |
| Subjects: | |
| Online Access: | https://www.epj-pv.org/articles/epjpv/full_html/2024/01/pv230043/pv230043.html |