Multi-sensor Approach for Multivalent Applications in Nanometrology
The field of nanometrology is subject to increasing complexity as dimensional structures become more intricate with smaller structural widths and increasingly larger surface areas, and with the inclusion of thousands of inspection features. The relevant metrology tools thus need to provide the abili...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA)
2012-06-01
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| Series: | International Journal of Automation and Smart Technology |
| Subjects: | |
| Online Access: | http://www.ausmt.org/index.php/AUSMT/article/view/149 |