Effect of Microwave Annealing on the Sensing Characteristics of HfO<sub>2</sub> Thin Film for High Sensitive pH-EGFET Sensor
Recently, certain challenges have persisted in PH sensor applications, especially when employing hafnium oxide (HfO<sub>2</sub>) thin films as sensing layers, where issues related to sensitivity, hysteresis, and long-term stability hamper performance. Microwave annealing (MWA) technology...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/10/1854 |