Influence of Substrate Position on the Microstructure and Mechanical Properties of CrN Coating Prepared by Closed Magnetron Sputtering
In order to obtain excellent properties of CrN coating, the CrN coating was prepared by closed unbalanced magnetron sputtering with substrate locating in different positions (one - axis, three - axis) in the system to study the effects of substrate position on the microstructure and mechanical prope...
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| Format: | Article |
| Language: | zho |
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Editorial Department of Materials Protection
2022-06-01
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| Series: | Cailiao Baohu |
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| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/220619.pdf |