Analysis of photoelastic properties of monocrystalline silicon
<p>Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Copernicus Publications
2020-07-01
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Series: | Journal of Sensors and Sensor Systems |
Online Access: | https://jsss.copernicus.org/articles/9/209/2020/jsss-9-209-2020.pdf |