Analysis of photoelastic properties of monocrystalline silicon

<p>Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As...

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Bibliographic Details
Main Authors: M. Stoehr, G. Gerlach, T. Härtling, S. Schoenfelder
Format: Article
Language:English
Published: Copernicus Publications 2020-07-01
Series:Journal of Sensors and Sensor Systems
Online Access:https://jsss.copernicus.org/articles/9/209/2020/jsss-9-209-2020.pdf