Analysis of photoelastic properties of monocrystalline silicon
<p>Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2020-07-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/9/209/2020/jsss-9-209-2020.pdf |
| Summary: | <p>Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon has a diamond lattice structure, the stress-dependent change in the refractive indices varies with the loading direction. In this work, an anisotropic stress-optic law is derived, and the corresponding stress-optical parameters are measured using a Brazilian disc test. The parameters were determined to be <span class="inline-formula"><math xmlns="http://www.w3.org/1998/Math/MathML" id="M1" display="inline" overflow="scroll" dspmath="mathml"><mrow><mo>(</mo><msub><mi mathvariant="italic">π</mi><mn mathvariant="normal">11</mn></msub><mo>-</mo><msub><mi mathvariant="italic">π</mi><mn mathvariant="normal">12</mn></msub><mo>)</mo><mo>=</mo><mn mathvariant="normal">14.4</mn><mo>⋅</mo><msup><mn mathvariant="normal">10</mn><mrow><mo>-</mo><mn mathvariant="normal">7</mn></mrow></msup></mrow></math><span><svg:svg xmlns:svg="http://www.w3.org/2000/svg" width="114pt" height="15pt" class="svg-formula" dspmath="mathimg" md5hash="73f78fd9f4f70b6d679a30b05037b11b"><svg:image xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="jsss-9-209-2020-ie00001.svg" width="114pt" height="15pt" src="jsss-9-209-2020-ie00001.png"/></svg:svg></span></span> MPa<span class="inline-formula"><sup>−1</sup></span> and <span class="inline-formula"><math xmlns="http://www.w3.org/1998/Math/MathML" id="M3" display="inline" overflow="scroll" dspmath="mathml"><mrow><msub><mi mathvariant="italic">π</mi><mn mathvariant="normal">44</mn></msub><mo>=</mo><mn mathvariant="normal">9.4</mn><mo>⋅</mo><msup><mn mathvariant="normal">10</mn><mrow><mo>-</mo><mn mathvariant="normal">7</mn></mrow></msup></mrow></math><span><svg:svg xmlns:svg="http://www.w3.org/2000/svg" width="74pt" height="15pt" class="svg-formula" dspmath="mathimg" md5hash="07fb3e6ffb9fda80dab331b044aa14b1"><svg:image xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="jsss-9-209-2020-ie00002.svg" width="74pt" height="15pt" src="jsss-9-209-2020-ie00002.png"/></svg:svg></span></span> MPa<span class="inline-formula"><sup>−1</sup></span>. The results of this work are compared to previous works found in the literature, and the deviations are discussed.</p> |
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| ISSN: | 2194-8771 2194-878X |