Transparent PZT Capacitors on Glass for Actuating Applications
Fully integrated transparent ITO/PZT/ITO capacitors on glass were obtained thanks to a recently developed wafer-to-wafer layer-transfer process to bypass the thermal budget issue associated with the high crystallization temperature of PZT (~700 °C). The fabricated devices show an average transparenc...
| Autors principals: | , , , , , , |
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| Format: | Article |
| Idioma: | English |
| Publicat: |
MDPI AG
2024-04-01
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| Col·lecció: | Proceedings |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2504-3900/97/1/158 |