Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/15/2/678 |