Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification
Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was propos...
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| Format: | Article |
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MDPI AG
2022-01-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/15/2/678 |
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| author | Bao-Xu Wang Jin-Yong Qi Yi-Ming Lu Jia-Xin Zheng Ying Xu Xue-Qing Liu |
| author_facet | Bao-Xu Wang Jin-Yong Qi Yi-Ming Lu Jia-Xin Zheng Ying Xu Xue-Qing Liu |
| author_sort | Bao-Xu Wang |
| collection | DOAJ |
| description | Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials. |
| first_indexed | 2024-03-10T01:02:55Z |
| format | Article |
| id | doaj.art-d2cf29c1390342ca8adee6a738c44e02 |
| institution | Directory Open Access Journal |
| issn | 1996-1944 |
| language | English |
| last_indexed | 2024-03-10T01:02:55Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Materials |
| spelling | doaj.art-d2cf29c1390342ca8adee6a738c44e022023-11-23T14:33:01ZengMDPI AGMaterials1996-19442022-01-0115267810.3390/ma15020678Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser ModificationBao-Xu Wang0Jin-Yong Qi1Yi-Ming Lu2Jia-Xin Zheng3Ying Xu4Xue-Qing Liu5State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaState Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, ChinaFemtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.https://www.mdpi.com/1996-1944/15/2/678foturan glass microlenslaser direct writingprofile scanningwet etching |
| spellingShingle | Bao-Xu Wang Jin-Yong Qi Yi-Ming Lu Jia-Xin Zheng Ying Xu Xue-Qing Liu Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification Materials foturan glass microlens laser direct writing profile scanning wet etching |
| title | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
| title_full | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
| title_fullStr | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
| title_full_unstemmed | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
| title_short | Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification |
| title_sort | rapid fabrication of smooth micro optical components on glass by etching assisted femtosecond laser modification |
| topic | foturan glass microlens laser direct writing profile scanning wet etching |
| url | https://www.mdpi.com/1996-1944/15/2/678 |
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