Focused-ion-beam induced damage in thin films of complex oxide BiFeO3
An unexpected, strong deterioration of crystal quality is observed in epitaxial perovskite BiFeO3 films in which microscale features have been patterned by focused-ion-beam (FIB) milling. Specifically, synchrotron x-ray microdiffraction shows that the damaged region extends to tens of μm, but does n...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-02-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4866051 |