Radiofrequency and 2.45 GHz electron cyclotron resonance H− volume production ion sources
The volume production of negative hydrogen ions ( ${{\rm{H}}}^{-}$ ) in plasma ion sources is based on dissociative electron attachment (DEA) to rovibrationally excited hydrogen molecules (H _2 ), which is a two-step process requiring both, hot electrons for ionization, and vibrational excitation of...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2016-01-01
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| Series: | New Journal of Physics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/1367-2630/18/10/105008 |