Development of Fixture Element for Vacuum Transportation of Silicon Wafer Using Electro-Rheological Gel
Semiconductor process technology increasingly requires high accuracy and efficiency. In the case of processing thin fragile substrate such as silicon wafer, it has to be fixed with low strain. In addition, its fixture device can be used under vacuum condition because some processes are carried out i...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2008-08-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/4/2_4_762/_pdf/-char/en |