A new route to apply nanometric alumina coating on powders by fluidized bed chemical vapor deposition
A new route to deposit alumina nanometric thin films on powders from the single source Aluminum Tri-Isopropoxide (ATI) precursor is developed using the Fluidized Bed Chemical Vapor Deposition (FBCVD) process. For this study, an easy-to-fluidize silica powder is used, as a first step to ultimately co...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2023-11-01
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Series: | Chemical Engineering Journal Advances |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2666821123001114 |