Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings

Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings

Ta hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (T<sub>sub</sub>) and sputtering power (P<sub>spu</sub>) at various conditions...

Full description

Bibliographic Details
Main Authors: Cuicui Liu, Jian Peng, Zhigang Xu, Qiang Shen, Chuanbin Wang
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Metals
Subjects:
α-Ta coatings
substrate temperature
sputtering power
combined effect
direct current magnetron sputtering
Online Access:https://www.mdpi.com/2075-4701/13/3/583

Internet

https://www.mdpi.com/2075-4701/13/3/583

Similar Items