Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings
Ta hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (T<sub>sub</sub>) and sputtering power (P<sub>spu</sub>) at various conditions...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
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Series: | Metals |
Subjects: | |
Online Access: | https://www.mdpi.com/2075-4701/13/3/583 |