Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings
Ta hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (T<sub>sub</sub>) and sputtering power (P<sub>spu</sub>) at various conditions...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Metals |
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| Online Access: | https://www.mdpi.com/2075-4701/13/3/583 |
| _version_ | 1797610168044748800 |
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| author | Cuicui Liu Jian Peng Zhigang Xu Qiang Shen Chuanbin Wang |
| author_facet | Cuicui Liu Jian Peng Zhigang Xu Qiang Shen Chuanbin Wang |
| author_sort | Cuicui Liu |
| collection | DOAJ |
| description | Ta hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (T<sub>sub</sub>) and sputtering power (P<sub>spu</sub>) at various conditions (T<sub>sub</sub> = 200–400 °C, P<sub>spu</sub> = 100–175 W). The combined effect of T<sub>sub</sub> and P<sub>spu</sub> on the crystalline phase, surface morphology, and mechanical properties of the coatings was investigated. It was found that higher P<sub>spu</sub> was required in order to obtain α-Ta coatings when the coatings are deposited at lower T<sub>sub</sub>, and vice versa, because the deposition energy (controlled by T<sub>sub</sub> and P<sub>spu</sub> simultaneously) within a certain range was necessary. At the optimum T<sub>sub</sub> with the corresponding P<sub>spu</sub> of 200 °C-175 W, 300 °C-150 W, and 400 °C-100 W, respectively, the single-phased and homogeneous α-Ta coatings were obtained. Moreover, the α-Ta coating deposited at T<sub>sub</sub>-P<sub>spu</sub> of 400 °C-100 W showed a denser surface and a finer grain, and as a result exhibited higher hardness (9 GPa), better toughness, and larger adhesion (18.46 N). |
| first_indexed | 2024-03-11T06:10:44Z |
| format | Article |
| id | doaj.art-d41a3257b76041cc8596e8f495ebb22d |
| institution | Directory Open Access Journal |
| issn | 2075-4701 |
| language | English |
| last_indexed | 2024-03-11T06:10:44Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Metals |
| spelling | doaj.art-d41a3257b76041cc8596e8f495ebb22d2023-11-17T12:39:46ZengMDPI AGMetals2075-47012023-03-0113358310.3390/met13030583Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard CoatingsCuicui Liu0Jian Peng1Zhigang Xu2Qiang Shen3Chuanbin Wang4Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaHubei Key Laboratory of Advanced Technology for Automotive Components, Wuhan University of Technology, Wuhan 430070, ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, ChinaChaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, ChinaTa hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (T<sub>sub</sub>) and sputtering power (P<sub>spu</sub>) at various conditions (T<sub>sub</sub> = 200–400 °C, P<sub>spu</sub> = 100–175 W). The combined effect of T<sub>sub</sub> and P<sub>spu</sub> on the crystalline phase, surface morphology, and mechanical properties of the coatings was investigated. It was found that higher P<sub>spu</sub> was required in order to obtain α-Ta coatings when the coatings are deposited at lower T<sub>sub</sub>, and vice versa, because the deposition energy (controlled by T<sub>sub</sub> and P<sub>spu</sub> simultaneously) within a certain range was necessary. At the optimum T<sub>sub</sub> with the corresponding P<sub>spu</sub> of 200 °C-175 W, 300 °C-150 W, and 400 °C-100 W, respectively, the single-phased and homogeneous α-Ta coatings were obtained. Moreover, the α-Ta coating deposited at T<sub>sub</sub>-P<sub>spu</sub> of 400 °C-100 W showed a denser surface and a finer grain, and as a result exhibited higher hardness (9 GPa), better toughness, and larger adhesion (18.46 N).https://www.mdpi.com/2075-4701/13/3/583α-Ta coatingssubstrate temperaturesputtering powercombined effectdirect current magnetron sputtering |
| spellingShingle | Cuicui Liu Jian Peng Zhigang Xu Qiang Shen Chuanbin Wang Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings Metals α-Ta coatings substrate temperature sputtering power combined effect direct current magnetron sputtering |
| title | Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings |
| title_full | Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings |
| title_fullStr | Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings |
| title_full_unstemmed | Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings |
| title_short | Combined Effect of Substrate Temperature and Sputtering Power on Phase Evolution and Mechanical Properties of Ta Hard Coatings |
| title_sort | combined effect of substrate temperature and sputtering power on phase evolution and mechanical properties of ta hard coatings |
| topic | α-Ta coatings substrate temperature sputtering power combined effect direct current magnetron sputtering |
| url | https://www.mdpi.com/2075-4701/13/3/583 |
| work_keys_str_mv | AT cuicuiliu combinedeffectofsubstratetemperatureandsputteringpoweronphaseevolutionandmechanicalpropertiesoftahardcoatings AT jianpeng combinedeffectofsubstratetemperatureandsputteringpoweronphaseevolutionandmechanicalpropertiesoftahardcoatings AT zhigangxu combinedeffectofsubstratetemperatureandsputteringpoweronphaseevolutionandmechanicalpropertiesoftahardcoatings AT qiangshen combinedeffectofsubstratetemperatureandsputteringpoweronphaseevolutionandmechanicalpropertiesoftahardcoatings AT chuanbinwang combinedeffectofsubstratetemperatureandsputteringpoweronphaseevolutionandmechanicalpropertiesoftahardcoatings |