Phase Properties of Different HfO<sub>2</sub> Polymorphs: A DFT-Based Study
Background: Hafnium Dioxide (HfO<sub>2</sub>) represents a hopeful material for gate dielectric thin films in the field of semiconductor integrated circuits. For HfO<sub>2,</sub> several crystal structures are possible, with different properties which can be difficult to desc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/12/1/90 |