Phase Properties of Different HfO<sub>2</sub> Polymorphs: A DFT-Based Study

Phase Properties of Different HfO<sub>2</sub> Polymorphs: A DFT-Based Study

Background: Hafnium Dioxide (HfO<sub>2</sub>) represents a hopeful material for gate dielectric thin films in the field of semiconductor integrated circuits. For HfO<sub>2,</sub> several crystal structures are possible, with different properties which can be difficult to desc...

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Bibliographic Details
Main Authors:	Emiliano Laudadio, Pierluigi Stipa, Luca Pierantoni, Davide Mencarelli
Format:	Article
Language:	English
Published:	MDPI AG 2022-01-01
Series:	Crystals
Subjects:	HfO<sub>2</sub> DFT hubbard energy defects
Online Access:	https://www.mdpi.com/2073-4352/12/1/90

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