Design and simulation of an aluminum nitride piezoelectric resonant pressure sensor
In this paper, a novel aluminum nitride (AlN) resonant pressure sensor with piezoelectric-excitation and piezoelectric-detection is presented. The key structure of this resonator is an AlN flexible beam. Parallel electrodes are designed on the beam to excite the resonance structure in-plane. All lay...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0088626 |