The Theoretical and Experimental Investigation of the Fluorinated Palladium β-Diketonate Derivatives: Structure and Physicochemical Properties
To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH<sub>3</sub>CXCHCO(R))<sub>2</sub>] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (<b>1</b>); pfpa−5,5,6,6,6-pentafluoro-2,4-he...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-03-01
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Series: | Molecules |
Subjects: | |
Online Access: | https://www.mdpi.com/1420-3049/27/7/2207 |