The Theoretical and Experimental Investigation of the Fluorinated Palladium β-Diketonate Derivatives: Structure and Physicochemical Properties

To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH<sub>3</sub>CXCHCO(R))<sub>2</sub>] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (<b>1</b>); pfpa−5,5,6,6,6-pentafluoro-2,4-he...

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Bibliographic Details
Main Authors: Svetlana I. Dorovskikh, Denis E. Tryakhov, Darya D. Klyamer, Alexander S. Sukhikh, Irina V. Mirzaeva, Natalia B. Morozova, Tamara V. Basova
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Molecules
Subjects:
Online Access:https://www.mdpi.com/1420-3049/27/7/2207