Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity
In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a micro- cantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changin...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2012-12-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_66184_878addb7f51afd6ec012520cad0ff45a.pdf |