Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity
In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a micro- cantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changin...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2012-12-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_66184_878addb7f51afd6ec012520cad0ff45a.pdf |
| _version_ | 1827358445265747968 |
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| author | Ibtissam Mahdi Shihab |
| author_facet | Ibtissam Mahdi Shihab |
| author_sort | Ibtissam Mahdi Shihab |
| collection | DOAJ |
| description | In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a micro- cantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing the micro-cantilevers profile and its cross-section shape was investigated. A finite element ANSYS was used to analyze these models. The micro-cantilevers are made of silicon with elastic modulus 130Gpa and poisson’s ratio 0.28. Several cases were studied by making one, two and three holes in each biosensor piezoresistive micro-cantilevers (rectangular (R), triangular (T), and step(S) profile cantilever). Results showed that triangular micro-cantilever with two holes (T22) has the better sensitivity, also showed T12 respectively 61.7% and 65% higher sensitivity than R12, S12. |
| first_indexed | 2024-03-08T06:10:53Z |
| format | Article |
| id | doaj.art-d4a006dd7e9347e1b1331f03d0d55017 |
| institution | Directory Open Access Journal |
| issn | 1681-6900 2412-0758 |
| language | English |
| last_indexed | 2024-03-08T06:10:53Z |
| publishDate | 2012-12-01 |
| publisher | Unviversity of Technology- Iraq |
| record_format | Article |
| series | Engineering and Technology Journal |
| spelling | doaj.art-d4a006dd7e9347e1b1331f03d0d550172024-02-04T17:40:30ZengUnviversity of Technology- IraqEngineering and Technology Journal1681-69002412-07582012-12-0130203581359510.30684/etj.30.20.966184Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-SensitivityIbtissam Mahdi ShihabIn this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a micro- cantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing the micro-cantilevers profile and its cross-section shape was investigated. A finite element ANSYS was used to analyze these models. The micro-cantilevers are made of silicon with elastic modulus 130Gpa and poisson’s ratio 0.28. Several cases were studied by making one, two and three holes in each biosensor piezoresistive micro-cantilevers (rectangular (R), triangular (T), and step(S) profile cantilever). Results showed that triangular micro-cantilever with two holes (T22) has the better sensitivity, also showed T12 respectively 61.7% and 65% higher sensitivity than R12, S12.https://etj.uotechnology.edu.iq/article_66184_878addb7f51afd6ec012520cad0ff45a.pdfmicrocantileverssensitivitybiosensorspiezresistive |
| spellingShingle | Ibtissam Mahdi Shihab Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity Engineering and Technology Journal micro cantilevers sensitivity biosensors piezresistive |
| title | Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity |
| title_full | Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity |
| title_fullStr | Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity |
| title_full_unstemmed | Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity |
| title_short | Influence of Shape Design of MEMS (Micro-Cantilever Based Sensor) on High-Sensitivity |
| title_sort | influence of shape design of mems micro cantilever based sensor on high sensitivity |
| topic | micro cantilevers sensitivity biosensors piezresistive |
| url | https://etj.uotechnology.edu.iq/article_66184_878addb7f51afd6ec012520cad0ff45a.pdf |
| work_keys_str_mv | AT ibtissammahdishihab influenceofshapedesignofmemsmicrocantileverbasedsensoronhighsensitivity |