Using parallel plates capacitor as a volumetric flow rate sensor and direction detection for microfluidic/nanofluidic and extra smaller applications
This paper shows how a single parallel plate capacitor can be used to sense volumetric flow rate in micro/nano and smaller scale fluidic conduits and how a double parallel plate capacitor can be used to sense both volumetric flow rate and direction of flow. The concept was developed based on the pri...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
KeAi Communications Co., Ltd.
2023-01-01
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| Series: | Sensors International |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666351123000219 |