Real-time dynamic behavior analysis of thin film during in-situ SEM tensile testing
Thin films are widely used in micro/nano-electronics. To accurately evaluate the mechanical behavior of thin films, it is important to analyze their dynamic behavior during mechanical testing in real-time. However, high-magnification SEM (Scanning Electron Microscope) images for applying strain meas...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2024-02-01
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Series: | Heliyon |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844024022898 |