Real-time dynamic behavior analysis of thin film during in-situ SEM tensile testing

Thin films are widely used in micro/nano-electronics. To accurately evaluate the mechanical behavior of thin films, it is important to analyze their dynamic behavior during mechanical testing in real-time. However, high-magnification SEM (Scanning Electron Microscope) images for applying strain meas...

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Bibliographic Details
Main Authors: Hyeon-Gyu Min, Jun-Hyub Park
Format: Article
Language:English
Published: Elsevier 2024-02-01
Series:Heliyon
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2405844024022898