ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO drift reduction. In this work, we conduct an elaborate investigation on the impac...

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Bibliographic Details
Main Authors: Pengfei Xu, Zhenyu Wei, Lu Jia, Yongmei Zhao, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Micromachines
Subjects:
ZRO drift
MEMS gyroscope
internal and packaging stresses
finite element analysis
stress release
Online Access:https://www.mdpi.com/2072-666X/12/11/1329

Internet

https://www.mdpi.com/2072-666X/12/11/1329

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