Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification

Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification

In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic beam, coplanar waveguide (CPW) transmiss...

Full description

Bibliographic Details
Main Authors: Zhongliang Deng, Yucheng Wang, Kun Deng, Chengqi Lai, Jiali Zhou
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
RF MEMS
high isolation
low insertion loss
high capacitance ratio
Online Access:https://www.mdpi.com/2072-666X/13/5/646

Internet

https://www.mdpi.com/2072-666X/13/5/646

Similar Items