Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation

Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation

In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low...

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Bibliographic Details
Main Authors: Yong Zhu, Jitendra Pal
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS)
radio frequency (RF)
switch
electrothermal actuation
electrostatic actuation
insertion loss
Online Access:https://www.mdpi.com/2072-666X/12/10/1237

Internet

https://www.mdpi.com/2072-666X/12/10/1237

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