Design, Manufacturing and characterization of integrated inductors with magnetic layers for DC-DC converter

Design, Manufacturing and characterization of integrated inductors with magnetic layers for DC-DC converter

This paper presents the conception, fabrication and characterization of integrated inductors containing magnetic layers. We require different steps of micro-technologies: preparation of glass and ferrite substrates, RF sputtering, photolithography, etching and finally electroplating techniques for c...

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Bibliographic Details
Main Authors: D. Yaya, D. Allassem, M. Youssouf, A. Siblini, J. P. Chatelon, J. J. Rousseau
Format: Article
Language:English
Published: Advanced Electromagnetics 2012-10-01
Series:Advanced Electromagnetics
Subjects:
inductor
photolithography
YIG
thin films
magnetic layer
RF sputtering
Online Access:https://aemjournal.org/index.php/AEM/article/view/47

Internet

https://aemjournal.org/index.php/AEM/article/view/47

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