Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy
Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach...
| Главные авторы: | , , , , , , , |
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| Формат: | Статья |
| Язык: | English |
| Опубликовано: |
Elsevier
2024-06-01
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| Серии: | Micro and Nano Engineering |
| Предметы: | |
| Online-ссылка: | http://www.sciencedirect.com/science/article/pii/S2590007224000108 |