Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy

Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy

Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach...

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Bibliographic Details
Main Authors: P. Lagrain, K. Paulussen, E. Grieten, G. Van den Bosch, S. Rachidi, D. Yudistira, L. Wouters, T. Hantschel
Format: Article
Language:English
Published: Elsevier 2024-06-01
Series:Micro and Nano Engineering
Subjects:
Focused ion beam
FIB/SEM
Dual-beam
Electrical SPM
SSRM
C-AFM
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007224000108

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http://www.sciencedirect.com/science/article/pii/S2590007224000108

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