Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films
The current study aims to examine the impact of nitrogen content and film thickness on the structural and tribo-mechanical characteristics of reactive sputtered MoN thin films. Molybdenum nitride thin films with thicknesses ranging from 0.2 to 1.25 m have been applied to steel and silicon substrates...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Netherlands Press
2022-07-01
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| Series: | Metallurgical & Materials Engineering |
| Subjects: | |
| Online Access: | https://metall-mater-eng.com/index.php/home/article/view/823 |