Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films
The current study aims to examine the impact of nitrogen content and film thickness on the structural and tribo-mechanical characteristics of reactive sputtered MoN thin films. Molybdenum nitride thin films with thicknesses ranging from 0.2 to 1.25 m have been applied to steel and silicon substrates...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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The Netherlands Press
2022-07-01
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| Series: | Metallurgical & Materials Engineering |
| Subjects: | |
| Online Access: | https://metall-mater-eng.com/index.php/home/article/view/823 |
| _version_ | 1797963110930186240 |
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| author | Abdelaziz Abboudi Linda Aissani Abdenour Saoudi Hamid Djebaili |
| author_facet | Abdelaziz Abboudi Linda Aissani Abdenour Saoudi Hamid Djebaili |
| author_sort | Abdelaziz Abboudi |
| collection | DOAJ |
| description | The current study aims to examine the impact of nitrogen content and film thickness on the structural and tribo-mechanical characteristics of reactive sputtered MoN thin films. Molybdenum nitride thin films with thicknesses ranging from 0.2 to 1.25 m have been applied to steel and silicon substrates for this purpose, with various amounts of controlled atmosphere (Ar+N2). Then, the films are characterized using XRD (X-ray diffraction), EDX (energy dispersive X-ray analysis), SEM (scanning electron microscopy), FTIR (Fourier-transform infrared spectroscopy), and nanoindentation. The residual stress was measured using the Stoney formula. Results show that a high compressive residual stress of -5.7 GPa is present in the film with a 0.3 μm thickness and gradually decreases with increasing film thickness. Above 1 µm of film thickness, there is no change in the density of the MoN films. Also, the coating hardness and Young’s modulus vary between 9.5 and 35 GPa, and 266 and 320 GPa, respectively, depending on nitrogen content and film thickness. Lastly, the friction of the MoN thin films is estimated to be around 0.55, which proves that the oxide is being slowly removed. |
| first_indexed | 2024-04-11T01:23:13Z |
| format | Article |
| id | doaj.art-d5a519a524e84636b7cdfb30ef449872 |
| institution | Directory Open Access Journal |
| issn | 2217-8961 2812-9105 |
| language | English |
| last_indexed | 2024-04-11T01:23:13Z |
| publishDate | 2022-07-01 |
| publisher | The Netherlands Press |
| record_format | Article |
| series | Metallurgical & Materials Engineering |
| spelling | doaj.art-d5a519a524e84636b7cdfb30ef4498722023-01-03T10:55:31ZengThe Netherlands PressMetallurgical & Materials Engineering2217-89612812-91052022-07-0128341943310.30544/8231061Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin filmsAbdelaziz Abboudi0Linda Aissani1Abdenour Saoudi2https://orcid.org/0000-0002-9845-0290Hamid Djebaili3Department of Mechanical Engineering, and Advanced Materials Laboratory (ISMA), Abbes Laghrour University, Khenchela 40000, AlgeriaPhysics Department, Abbes Laghrour University, Khenchela 40000, Algeria; and Laboratory of Active Components and Materials, Larbi Ben M’Hidi University, Oum El Bouaghi, 04000, AlgeriaDepartment of Mechanical Engineering, and Advanced Materials Laboratory (ISMA), Abbes Laghrour University, Khenchela 40000, AlgeriaDepartment of Mechanical Engineering, and Advanced Materials Laboratory (ISMA), Abbes Laghrour University, Khenchela 40000, AlgeriaThe current study aims to examine the impact of nitrogen content and film thickness on the structural and tribo-mechanical characteristics of reactive sputtered MoN thin films. Molybdenum nitride thin films with thicknesses ranging from 0.2 to 1.25 m have been applied to steel and silicon substrates for this purpose, with various amounts of controlled atmosphere (Ar+N2). Then, the films are characterized using XRD (X-ray diffraction), EDX (energy dispersive X-ray analysis), SEM (scanning electron microscopy), FTIR (Fourier-transform infrared spectroscopy), and nanoindentation. The residual stress was measured using the Stoney formula. Results show that a high compressive residual stress of -5.7 GPa is present in the film with a 0.3 μm thickness and gradually decreases with increasing film thickness. Above 1 µm of film thickness, there is no change in the density of the MoN films. Also, the coating hardness and Young’s modulus vary between 9.5 and 35 GPa, and 266 and 320 GPa, respectively, depending on nitrogen content and film thickness. Lastly, the friction of the MoN thin films is estimated to be around 0.55, which proves that the oxide is being slowly removed.https://metall-mater-eng.com/index.php/home/article/view/823reactive sputtered mon films; atmosphere content; film thickness; ftir spectroscopy; tribo-mechanical properties. |
| spellingShingle | Abdelaziz Abboudi Linda Aissani Abdenour Saoudi Hamid Djebaili Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films Metallurgical & Materials Engineering reactive sputtered mon films; atmosphere content; film thickness; ftir spectroscopy; tribo-mechanical properties. |
| title | Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films |
| title_full | Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films |
| title_fullStr | Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films |
| title_full_unstemmed | Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films |
| title_short | Effect of film thickness on the structural and tribo-mechanical properties of reactive sputtered molybdenum nitride thin films |
| title_sort | effect of film thickness on the structural and tribo mechanical properties of reactive sputtered molybdenum nitride thin films |
| topic | reactive sputtered mon films; atmosphere content; film thickness; ftir spectroscopy; tribo-mechanical properties. |
| url | https://metall-mater-eng.com/index.php/home/article/view/823 |
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