Adhesion Behavior between Multilayer Graphene and Semiconductor Substrates

A high bonding strength between graphene and a semiconductor surface is significant to the performance of graphene-based Micro-Electro Mechanical Systems/Nano-Electro Mechanical Systems (MEMS/NEMS) devices. In this paper, by applying a series of constant vertical upward velocities (V<sub>up<...

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Bibliographic Details
Main Authors: Qi Zhang, Xin Ma, Yulong Zhao
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/8/11/2107