Development of evaluation method for fracture strength of thin films using multilayer bulge specimen
For designing sensors, it is very important to know the mechanical strength of constituent thin film materials. Although material strength is generally measured by tensile experiment, it is difficult to apply it to thin films. In this work, we developed a new method which can easily evaluate the fra...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2018-12-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/84/868/84_18-00273/_pdf/-char/en |