Influence of oxygen flow rate on properties of indium tin oxide thin films prepared by ion-assisted electron beam evaporation
Indium tin oxide (ITO) thin films with various oxygen flow rates were deposited onto glass substrates by ion-assistedelectron beam evaporation. All other deposition parameters were kept constant. The electrical and optical properties of theITO thin films have been investigated as a function of oxyge...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Prince of Songkla University
2009-11-01
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| Series: | Songklanakarin Journal of Science and Technology (SJST) |
| Subjects: | |
| Online Access: | http://www.rdoapp.psu.ac.th/html/sjst/journal/31-5/0125-3395-31-5-577-581.pdf |