10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr<sub>0.52</sub>Ti<sub>0.48</sub>O<sub>3</sub> (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to...

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Bibliographic Details
Main Authors: Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, Judith A. Todd
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Sensors
Subjects:
flexible 2D PMUT arrays
finite element analysis
PZFlex
virtual prototyping
pulse-echo/spectral response
surface displacement
Online Access:https://www.mdpi.com/1424-8220/20/15/4335

Internet

https://www.mdpi.com/1424-8220/20/15/4335

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