Novel Method for Image-Based Quantified In Situ Transmission Electron Microscope Nanoindentation with High Spatial and Temporal Resolutions

Novel Method for Image-Based Quantified In Situ Transmission Electron Microscope Nanoindentation with High Spatial and Temporal Resolutions

In situ TEM mechanical stages based on micro-electromechanical systems (MEMS) have developed rapidly over recent decades. However, image-based quantification of MEMS mechanical stages suffers from the trade-off between spatial and temporal resolutions. Here, by taking in situ TEM nanoindentation as...

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Bibliographic Details
Main Authors: Jiabao Zhang, Xudong Yang, Zhipeng Li, Jixiang Cai, Jianfei Zhang, Xiaodong Han
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Micromachines
Subjects:
mechanical quantification
in situ TEM
nanoindentation
focused ion beam
MEMS chip
Online Access:https://www.mdpi.com/2072-666X/14/9/1708

Internet

https://www.mdpi.com/2072-666X/14/9/1708

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