Design of silicon piezoresistive barometer with high-precisio

In view of problems of temperature drift and big discreteness of silicon piezoresistive pressure sensor which cause application of the pressure sensor to be limited, a silicon piezoresistive and digital barometer with high-precision was designed. The barometer uses surface-fitting algorithm with who...

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Bibliographic Details
Main Authors: GAO Lei, MA Ying-hui, LIU Yi, MAO Wan-hua
Format: Article
Language:zho
Published: Editorial Department of Industry and Mine Automation 2013-12-01
Series:Gong-kuang zidonghua
Subjects:
Online Access:http://www.gkzdh.cn/article/doi/10.7526/j.issn.1671-251X.2013.12.006