Design of silicon piezoresistive barometer with high-precisio
In view of problems of temperature drift and big discreteness of silicon piezoresistive pressure sensor which cause application of the pressure sensor to be limited, a silicon piezoresistive and digital barometer with high-precision was designed. The barometer uses surface-fitting algorithm with who...
Main Authors: | , , , |
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Format: | Article |
Language: | zho |
Published: |
Editorial Department of Industry and Mine Automation
2013-12-01
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Series: | Gong-kuang zidonghua |
Subjects: | |
Online Access: | http://www.gkzdh.cn/article/doi/10.7526/j.issn.1671-251X.2013.12.006 |