Preparation of a ZnO Nanostructure as the Anode Material Using RF Magnetron Sputtering System

In this study, a four-inch zinc oxide (ZnO) nanostructure was synthesized using radio frequency (RF) magnetron sputtering to maximize the electrochemical performance of the anode material of a lithium-ion battery. All materials were grown on cleaned p-type silicon (100) wafers with a deposited coppe...

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Bibliographic Details
Main Authors: Seokwon Lee, Yeon-Ho Joung, Yong-Kyu Yoon, Wonseok Choi
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/2/215