Determination of group velocity based on nanoindentation using Si and SiO2/Si wafers
The analyses of thermal transport properties can help improve the performance of high-tech semiconducting devices, such as thermoelectric generators and electronic devices. However, methods to measure thermal transport properties are limited, especially the group velocity and phonon mean free path (...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2021-07-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0055581 |