Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

Piezoelectric aluminum nitride (AlN) thin film, as a commonly used material for high-frequency acoustic resonators, has been a research hotspot in the RF field. Doping Sc elements in AlN is one of most effective methods to improve the piezoelectricity of the material. In this work, the first princip...

Full description

Bibliographic Details
Main Authors: Laixia Nian, Yuanhang Qu, Xiyu Gu, Tiancheng Luo, Ying Xie, Min Wei, Yao Cai, Yan Liu, Chengliang Sun
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Micromachines
Subjects:
composite film
AlN/ScAlN
lamb wave resonator
first principal calculation
Online Access:https://www.mdpi.com/2072-666X/14/3/557

Internet

https://www.mdpi.com/2072-666X/14/3/557

Similar Items