Photonic Microcantilevers With Interferometric Bragg Grating Interrogation

Photonic Microcantilevers With Interferometric Bragg Grating Interrogation

Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a s...

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Bibliographic Details
Main Authors: Lewis G. Carpenter, Christopher Holmes, Benjamin D. Snow, James C. Gates, Peter G. R. Smith
Format: Article
Language:English
Published: IEEE 2012-01-01
Series:IEEE Photonics Journal
Subjects:
Micro and nano opto-electro-mechanical systems (MOEMS)
sensors
waveguide devices
Online Access:https://ieeexplore.ieee.org/document/6256677/

Internet

https://ieeexplore.ieee.org/document/6256677/

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