An Overview of Atomic Layer Deposition Technique: Synthesis of ZnO, TiO2 and Al2O3 Films
Technological products in the fields of optoelectronic, energy conversion, nano-medical applications and catalysis etc. need to produce nano-sized materials production due to the technologies miniaturization together with developing technologies. For this purpose, scientific studies are focus on the...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Gazi University
2019-09-01
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| Series: | Gazi Üniversitesi Fen Bilimleri Dergisi |
| Subjects: | |
| Online Access: | https://dergipark.org.tr/en/download/article-file/801860 |